Characterization and growth of M-plane GaN on LiGaO2 substrate by Plasma-Assisted Molecular Beam Epitaxy
碩士 === 國立中山大學 === 物理學系研究所 === 100 === In this thesis, we have studied the growth of M-plane GaN thin film on LiGaO2 (100) substrate by Plasma-Assisted Molecular Beam Epitaxy. We found that the growth of GaN thin films on as-received LiGaO2 substrates is poly-crystalline by analysis of X-ray diffrac...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3x3e2z |