An Integrated and Improved Dispatching Approach to Reduce Cycle Time of Wet Etch and Furnace Area in Semiconductor Fabrication

An Integrated and Improved Dispatching Approach to Reduce Cycle Time of Wet Etch and Furnace Area in Semiconductor Fabrication

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100

Bibliographic Details
Main Author:	張嘉祐
Other Authors:	張國浩
Format:	Others
Language:	en_US
Published:	2012
Online Access:	http://ndltd.ncl.edu.tw/handle/46425907366885108393

Similar Items

Dispatching Rules with Queue-Time-Limit Consideration for Furnace in Wafer Fabrication Factory
by: Chien-Chi Tsai, et al.
Published: (2008)

Components for gallium arsenide integrated optics fabricated by wet hemical etching
by: Macfayden, D. N.
Published: (1980)

Automated lot dispatching in semiconductor fabrication
by: Roznitsky, Yoel, 1974-
Published: (2014)

Dry etching and materials in semiconductor fabrication
by: Banks, Peter Michael
Published: (1989)

The study of plasma etching in semiconductor fabrication
by: Morgan, R. A.
Published: (1984)

Fabrication of quartz micro-pillars using wet etching
by: Chih-wei Huang, et al.
Published: (2011)

The study on fabrication of accelerometer and micro-tip by wet etch
by: Xu, Yu-Wen, et al.
Published: (1993)

The study on fabrication of accelerometer and micro-tip by wet etch
by: XU, YU-WEN, et al.
Published: (1993)

Dispatching policy for deposition furnace of Wafer Fabrication with the interference of hot lot.
by: Wen-Hsin, Yang, et al.
Published: (2013)

Formation of Aminosilane and Thiol Monolayers on Semiconductor Surfaces and Bulk Wet Etching of III--V Semiconductors
by: Jain, Rahul
Published: (2012)

An improved anisotropic wet etching process for the fabrication of silicon MEMS structures using a single etching mask
by: Pal, P., et al.
Published: (2008)

High-Tc superconducting THz emitters fabricated by wet etching
by: Yuuki Shibano, et al.
Published: (2019-01-01)

A Study of Fabrication for Micro Structures by Anisotropic Wet Etching
by: Chun-Nan Lu, et al.
Published: (2000)

Study on the Fabrication of Quantum Wires/Dots by Wet Etching Techniques
by: Yang, Hsu-Wen, et al.
Published: (1993)

Releasing Rules in Furnace of Semiconductor Wafer Fabrication with Batch-process and Time Constraints
by: CHEN, TZU-CHUN, et al.
Published: (2013)

Theory of wet etch on crystal
by: Ｗen-Tain Chang Chien, et al.
Published: (2000)

Etch Process Improvement for Passivation Layer of Semiconductor Devices to Reduce the Polymer Residues
by: Chang, Si-Fu, et al.
Published: (2012)

Fabrication of polygonal nanoholes by localized mask-free wet anisotropic etching
by: Qi Chen, et al.
Published: (2017-10-01)

Fabrication of Si Nanostructures by Scanning Probe Lithography and Anisotropic Wet Etching
by: Shih-Sen Chien ( Forest S.-S. Chien ), et al.
Published: (2002)

Fabrication and Applications of High Quality Wet etched Tapered Fiber Probes
by: 郭惠玲
Published: (2003)

Lithium niobate ridge optical waveguide devices fabricated by wet etching
by: Chen, Rui Xin, et al.
Published: (1996)

Design and Fabrication of a Gas-driven Micropump by Wet Etching Technique
by: Chuan-Chih Chen, et al.
Published: (2006)

MEMS Fabrication Using Wet Etching for Millimeter-Wave Filter Applications
by: Jian-Yi Li, et al.
Published: (2005)

Fabrication of Large-area Periodic Arrays of Single-crystalline Silicon Nanorods by Chemical Wet Etching Processes
by: Jian-you Chen, et al.
Published: (2009)

Fundamental Studies in Selective Wet Etching and Corrosion Processes for High-Performance Semiconductor Devices
by: Mistkawi, Nabil George
Published: (2010)

Fabrication of Semiconductor Ring Lasers Using the Cryo-etching Technique
by: Tsai, Chia-ho, et al.
Published: (1997)

Applying Real Time Dispatching System To Reduce Cycle Time of Priority Lot
by: Po Lin Yu, et al.
Published: (2017)

Simulation and Analysis of Dispatching Rules with Continue-Queue-Time-Limit Consideration for Metal Etch Process in Wafer Fabrication Factory
by: LEE, YEN-TSE, et al.
Published: (2011)

A Study of Dispatching Logic for the Photolithography Area and the Furnace Area in a Wafer Fab
by: Xie, Zhi-Yue, et al.
Published: (1998)

Level set simulations of the anisotropic wet etching process for device fabrication in nanotechnologies
by: Rađenović Branislav, et al.
Published: (2010-01-01)

Investigation of volcano-shaped patterned sapphire substrate fabricated by wet etching process
by: Han Cheng Hsieh, et al.
Published: (2012)

The Study of a Fabrication of High Aspect Ratio Silicon Microstructures By Wet Etching
by: Bing-Yang Lu, et al.
Published: (2007)

Fabricated the High Brighness Light Emitting Diodes Through the Photoelectrochemical Wet Etching.
by: Jing-Jie Dai, et al.
Published: (2006)

Fabrication of Quartz Nanoneedles by Using Cr Thin Films as Wet Etching Masks
by: Jian-Chang Liou, et al.
Published: (2010)

Study of Recessed-SAW Devices Fabrication by Proton-Exchange Wet-Etching Technology
by: Shih-Hung Tsai, et al.
Published: (2005)

Vertical Organic Transistor with Metallic Grid Fabricated by Nanoimprint Lithography and wet etching
by: Chung, Wei-Chih, et al.
Published: (2014)

Investigation and Fabrication of the Integration of Traveling- Wave Electroabsorption Modulator and Optical Mode Converter using Wet-Etching method
by: Shun-An Tsai, et al.
Published: (2006)

A study of semiconductor dispatching rules based flow time predictions
by: 張慶彬
Published: (1997)

Profile Prediction and Fabrication of Wet-Etched Gold Nanostructures for Localized Surface Plasmon Resonance
by: Zhou Xiaodong, et al.
Published: (2009-01-01)

Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching
by: Mailis, S., et al.
Published: (2000)

Cannot write session to /tmp/vufind_sessions/sess_da30d7qkatlmchirpa7t9fg6dl