Structure and Composition Analysis of LMBE Grown SrRuO3 thin film on SrTiO3
碩士 === 國立清華大學 === 材料科學工程學系 === 100 === High quality single crystalline SrRuO3 thin films have been grown epitaxially on SrTiO3 (001) by LMBE system and the growth was in-situ monitored by reflection high energy electron diffraction. The plume was formed by high energy laser ablation on target is the...
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95403393682508626651 |
| Summary: | 碩士 === 國立清華大學 === 材料科學工程學系 === 100 === High quality single crystalline SrRuO3 thin films have been grown epitaxially on SrTiO3 (001) by LMBE system and the growth was in-situ monitored by reflection high energy electron diffraction. The plume was formed by high energy laser ablation on target is the crucial for high quality growth. The distance between target and substrate has to be adjusted carefully which is depending on plume’s size and shape. Thin films will have big effect for any small disparity. Furthermore, growing temperature is one of the important factors for thin films growth. Therefore, the distances between target and substrate and the growth temperatures have to be studied carefully.
Structural studies were carried out by X-ray diffraction. The results of X-ray reflectivity measurement have shown the thickness of each layers and the roughness at their interfaces. Atomic force microscopy was utilized to thin films surface roughness. Structural and morphological studies were carried out by these analyses. The structure of the SrRuO3 films approached cubic phase.
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