Deposition and Oxidation Behavior of Ta-Zr Alloy Coatings for Glass Molding Dies

• Main Authors: Chen-Sin Min, 陳欣敏
• Other Authors: Chen Yung I
• Format: Others
• Language: en_US
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/65087967939333047549

碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 100 === Aspheric glass lenses have been produced widely due to the development of optoelectronic products. The glass molding dies play an important role in transferring the precision figure from dies to products. The purpose of this study is to develope the coatings,on glass molding dies, with high nanohardness, low surface roughness and good adhesion. Recently, the coatings for glass molding dies commonly used metal alloy films. In this study,Ta–Zr coating fabricated by sputtering and applied as the protective coating on dies at high temperature environment for molding glass. The nanohardness, surface roughness, phase stability and oxidation behavior were investigated.