Robust Controller Design and Integrate in a Multiple-Axis Piezoelectric Nanopositioning Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 100 === This paper applies robust control to a piezoelectric nano-positioning stage that has three degrees of freedom (DOF). In addition, we combine the nano-stage with a large stroke platform and a complementary three DOF stage, so that the system can achieve precisio...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/67800972513939942525 |