Fabrication of Newly Developed TCO Glass with Long Wavelength Scattering Property and its Applications in Silicon Based Thin Film Solar Cells

• Main Authors: YUAN-HUNG CHANG, 張元鴻
• Other Authors: Lu-Sheng Hong
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/8x9ck4

碩士 === 國立臺灣科技大學 === 化學工程系 === 100 === In this thesis, thin film amorphous silicon (a-Si:H) solar cells were fabricated by radio-frequency plasma-enhanced chemical vapor deposition. The result showed the short-circuit current (Jsc), open-circuit voltage (Voc) and fill factor (F.F.) of the cell were 16.81 mA/cm2, 854 mV and 61.26%, respectively, which corresponds an optoelectronic conversion efficiency ( ) of 8.79% when [TMB]/[SiH4]= 3 for the p layer. Second, Al-doped ZnO (AZO) films prepared by sputtering were deposited on glasses. The lowest resistivity of AZO layer obtained was 6.5 ×10-4 Ω∙cm at a film thickness of 800 nm. Finally, we fabricated a newly developed transparent conductive oxide (TCO) glass characterized by a spherical layer. A trial of a-Si:H thin film solar cell fabrication on this new textured TCO glass showed Jsc=17.1 mA/cm2, Voc=754 mV, F.F.=52.5% and =6.75%. Compared with a reference cell prepared on Asahi-U glass, 6.9% improvement in Jsc was obtained, indicating the effectiveness of the light-scattering of the proposed TCO glass.