| Summary: | 碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === Two triangular measurement systems, normal incidence and oblique incidence,
were investigated. Analysis and comparison were performed on structure of the
optical system, tilting object, and system precision. In addition, the scanning mirror
technique has been used as measurement method in oblique incidence system to
reduce the deviation of measuring position.
Linear array detector (LAD) was used in the system to sample the laser speckle
signals. The measurement precision was improved to sub-pixel level and
approached to commercial grade through the mounting techniques of optical elements,
signal processing and algorithms. In addition, considering the property of the
object’s surface to be measured, constant power feedback was used to improve the
measuring precision.
Finally, a structure of normal incidence triangulation method was coupled with
the measuring microscope to complete a new CNC vision measuring system with the
precision of 2μmin a measurement range of ±5mm.
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