Acoustic and Electric-Optical Characteristics of ZnO Thin Films with Nanostructures Grown on Silcon Substrates

• Main Authors: Cheng-Je Li, 李承哲
• Other Authors: Liang-Wen Ji
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/5u6m9m

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === The development of nanorods combined with surface acoustic wave UV sensor exploits the ultraviolet absorption of zinc oxide to generate electron - hole pairs; it results in the change of phase and gain when surface acoustic wave is transmitted. Detector developing by RF magnetron Sputter on silicon to produce a high quality of zinc oxide piezoelectric thin film, and through the photolithography to produce a IDT at the top of the film. Besides, to enhance the sensitivity of the detector, this research uses hydrothermal method on the detector to form a long nanorods structure, making it easier to absorb lights. This research based on the zinc oxide thin film of the best parameter process, and chooses the best hydrothermal method of parameter to produce mixed & unmixed nanorods detectors by exposure of UV radiation to see the difference on phase and gain. Measurement through the LCR Meter analysis on the detector, the research will figure out the affects to the lectron - hole pairs and Capacitance values after exposed under UV radiation. The outcome confirmed that after 6 hours growth with Ni mixed in nanorods, the sensor has the best sensitivity.