Fabrication of ZnO/Cu2O/Ni Solar Cells Prepared By Reactive Magnetron Sputtering

• Main Authors: Suz-Wei Lu 呂思緯, 呂思緯
• Other Authors: Lung-Chien Chen 陳隆建
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/dc4tw8

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 100 === In this study, Cuprous oxide (Cu2O) and Zinc oxide (ZnO) films were prepared by RF reactive magnetron sputtering to fabricated ZnO/Cu2O heterostructure solar cells. Using the metal copper (Cu) target and controlling the reaction gas ratio (Ar : O2) to prepare different performances of Cu2O thin films. Then, using annealing process to obtain single crystal phase Cu2O thin films. For the analyses of thin films, elements, composition and surface structure of Cu2O and ZnO thin films were characterized by SEM and XRD measurements. Mobility, carrier concentrations and resistances of Cu2O and ZnO thin films were measured by and Hall measurement. For the estimate of solar cells, Ni metal electrode were added by sputtering for I-V measurement. Performance of ZnO/Cu2O heterojuction solar cells were compared.