Thin film transistor array process inspection system to the In-Plane-Switching Liquid Crystal application and study

• Main Authors: PENG,CHUN-YI, 彭峻逸
• Other Authors: Chiung-Hui Lai
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/x5y7dj

碩士 === 中華大學 === 電機工程學系碩士在職專班 === 101 === In recent years the TFTs (Thin Film Transistor-Liquid Crystal Display) manufacturing technology are with large improvements for various LCD products. The size of glass substrate becomes larger and larger to increase both production rates and application fields. In order to get a better quality performance on the panel, and constantly develop new technologies at the same time. Which is considered to be the mainstream of development of the next generation is the In-Plane-Switching Liquid Crystal. However, the large the size of glass substrate, the yield rate is the most important factor to reduce the cost. In this paper, we will use the array process inspection system to detect the In-Plane-Switching Liquid Crystal. Defect detection method by Voltage Image Optical System (VIOS) of array process inspection system, we use an oscilloscope to adjust the input voltage waveform to reduce RC-delay and Feed Through effect. According the experiment, it can find 93% of the faults. When paired automatic Optical Inspection (AOI) overall detection rate can be increased 98%. The result will decrease product scrap, and the yield increase 10% by Laser repairing. It will cost down NTD 30,000,000 every year.