Study of Rapid Thermal Process and Efficiency Improvement for CIGS Thin Film Photovoltaic

• Main Authors: Soong, Ray-Ming, 宋瑞明
• Other Authors: Huang, Kun-Yuan
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/85152721340973049185

碩士 === 正修科技大學 === 電機工程研究所 === 101 === CuIn1-xGaxSe2 polycrystalline thin films have been considered as a low-cost, environment-friendly, wide absorption spectrum, and highly efficient solar cells. However, the market share of COGS is inferior to mono- and poly-Si solar cell at current, as result of the complexity of absorber formation process and lacking of appropriate and well-designed fabrication equipment. Two-stage technique of Rapid Thermal Process (RTP) was developed in the thesis conventional sulfurization after selenization (SAS) high-temperature furnace process. The propose tecjnique can reduce the process time and thermal budget thus enhancing throughput. The two-stage deposition technique can produce high-quality quaternary chalcopyrite thin films. The development of new growth schemes are along with appropriate equipment design concept. The parameters of SAS such as the temperature profiles, gas concentrations and reaction periods can be optimized by the technique.