Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry
碩士 === 健行科技大學 === 電子工程所 === 101 === In this thesis, a small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a half wave (λ/2...
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ndltd-TW-101CYU054280012016-03-16T04:14:34Z http://ndltd.ncl.edu.tw/handle/28452192542274077585 Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry 精密式微小位移測量儀之研究 Chi-Tun Chen 陳祺惇 碩士 健行科技大學 電子工程所 101 In this thesis, a small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a half wave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.3nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc. 王信福 2013 學位論文 ; thesis 66 zh-TW |
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碩士 === 健行科技大學 === 電子工程所 === 101 === In this thesis, a small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a half wave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.3nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.
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王信福 |
author_facet |
王信福 Chi-Tun Chen 陳祺惇 |
author |
Chi-Tun Chen 陳祺惇 |
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Chi-Tun Chen 陳祺惇 Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
author_sort |
Chi-Tun Chen |
title |
Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
title_short |
Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
title_full |
Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
title_fullStr |
Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
title_full_unstemmed |
Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
title_sort |
small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry |
publishDate |
2013 |
url |
http://ndltd.ncl.edu.tw/handle/28452192542274077585 |
work_keys_str_mv |
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