Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry

• Main Authors: Chi-Tun Chen, 陳祺惇
• Other Authors: 王信福
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/28452192542274077585

碩士 === 健行科技大學 === 電子工程所 === 101 === In this thesis, a small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a half wave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.3nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.