Fabrication of Surface Acoustic Wave Transverse Filters

• Main Authors: Cheng, Hanchen, 鄭涵蓁
• Other Authors: Ro, Ruyen
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/19306610951987482341

碩士 === 義守大學 === 電機工程學系 === 101 === For the SAW devices, the principle factor to decide the characteristic were the structure design of the finger electromagnetic, and the piezoelectric material of the substrate. In this research, we use LiNbO3 and LiTaO3 as substrates which have higher electromechanical coupling coefficient to produce the device of surface acoustic wave, and we’ll change the arrangement of electrode, the width of electrode, the material of propagation characteristics of SAW and the width of ground terminal to explore the affect between electrode parameters and frequency of element. Then use time-domain gating measurement to eliminate the distortion which caused by the electromagnetic feedthrough, to improve the second-order effects of element. Next we calculated the velocity of SAW. Finally, we explore the effect of change the time parameters for the photolithography process in developing step.