Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition
碩士 === 明新科技大學 === 化學工程與材料科技系碩士班 === 101 === Electroless plating is also known as autocatalyticplating or chemical plating. It stands for the process that depositing metal on substrate from metal ion solution by chemical reduction instead of electric power. The superiority of electroless plating is t...
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ndltd-TW-101MHIT00630222016-05-22T04:33:03Z http://ndltd.ncl.edu.tw/handle/43800799590598348383 Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition 探討電鍍液中添加聚乙烯醇及1,10-菲繞啉及對鍍層之影響 CHUANG,HAN-JU 莊翰儒 碩士 明新科技大學 化學工程與材料科技系碩士班 101 Electroless plating is also known as autocatalyticplating or chemical plating. It stands for the process that depositing metal on substrate from metal ion solution by chemical reduction instead of electric power. The superiority of electroless plating is that low void fraction, more anti-etching than electroplated film, good abrasion resistance, good adhesion, uniform plated metal, easy to operate and can be applied to non-conductive substrate. This process widely applied to ultra large-scale integration (ULSI) and cooper-plating process of integrated circuit fabrication in recent decades. Also, the electroless cooper plating getting more and more attentions due to seldom stress crack and good conductivity of cooper. The images of SEM show that samples fabricated with plating solution which contained 100 ppm of PVA and 30ppm of 1,10-Phenanthroline hydrate have the best flatness and fastest deposition rate. The resistance, sheet resistance and resistivity measured by four-point probes is 0.108398 mΩ, 0.491259 mΩ/cm2 and 0.0019μΩ-cm respectively, it’s also lower than other samples fabricated with plating solution which contained different concentration of PVA and 1,10-Phenanthroline hydrate. Results of X-ray diffraction analysis show that crystalline phase of deposited metal are 222 phase. Cross-cut test show that the adhesion force between deposited metal and substrate is 3B in ASTM class. Shyh-Min Liang 梁世明 2013 學位論文 ; thesis 43 zh-TW |
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碩士 === 明新科技大學 === 化學工程與材料科技系碩士班 === 101 === Electroless plating is also known as autocatalyticplating or chemical plating. It stands for the process that depositing metal on substrate from metal ion solution by chemical reduction instead of electric power. The superiority of electroless plating is that low void fraction, more anti-etching than electroplated film, good abrasion resistance, good adhesion, uniform plated metal, easy to operate and can be applied to non-conductive substrate. This process widely applied to ultra large-scale integration (ULSI) and cooper-plating process of integrated circuit fabrication in recent decades. Also, the electroless cooper plating getting more and more attentions due to seldom stress crack and good conductivity of cooper.
The images of SEM show that samples fabricated with plating solution which contained 100 ppm of PVA and 30ppm of 1,10-Phenanthroline hydrate have the best flatness and fastest deposition rate. The resistance, sheet resistance and resistivity measured by four-point probes is 0.108398 mΩ, 0.491259 mΩ/cm2 and 0.0019μΩ-cm respectively, it’s also lower than other samples fabricated with plating solution which contained different concentration of PVA and 1,10-Phenanthroline hydrate. Results of X-ray diffraction analysis show that crystalline phase of deposited metal are 222 phase. Cross-cut test show that the adhesion force between deposited metal and substrate is 3B in ASTM class.
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Shyh-Min Liang |
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Shyh-Min Liang CHUANG,HAN-JU 莊翰儒 |
author |
CHUANG,HAN-JU 莊翰儒 |
spellingShingle |
CHUANG,HAN-JU 莊翰儒 Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition |
author_sort |
CHUANG,HAN-JU |
title |
Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition |
title_short |
Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition |
title_full |
Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition |
title_fullStr |
Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition |
title_full_unstemmed |
Effects of Polyvinyl alcohol and 1,10-Phenanthroline on Electroless Copper Deposition |
title_sort |
effects of polyvinyl alcohol and 1,10-phenanthroline on electroless copper deposition |
publishDate |
2013 |
url |
http://ndltd.ncl.edu.tw/handle/43800799590598348383 |
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