An application of six sigma method on improving PSS of ICP process capability
碩士 === 國立勤益科技大學 === 研發科技與資訊管理研究所 === 101 === Patterned sapphire substrate(PPS) is the technique that has been widely used for manufacturing high brightness light emission diodes. It is used firstly to pattern regularly on flat sapphire substrate through etching process and then proceeds the LED epit...
Main Authors: | Tai-Jung Liu, 劉岱榕 |
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Other Authors: | Jiung-Ming Huang |
Format: | Others |
Language: | zh-TW |
Published: |
2012
|
Online Access: | http://ndltd.ncl.edu.tw/handle/85862438849403706131 |
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