| Summary: | 博士 === 國立交通大學 === 電信工程研究所 === 101 === A new robust micromachined embedded coplanar waveguide is proposed in the thesis. The central and ground plates are partially bended and overlapped within the trench. Due to tight coupling of the E-field between the overlapped plates, the micromachined embedded CPW line is capable of wide range characteristic impedance (17.9-92.3 Ω) with compact size. Furthermore, the area in which E-field radiates into the substrate of the micromachined embedded CPW is quite small compared to the conventional CPW, and therefore the dielectric loss of the micromachined embedded CPW can be effectively suppressed. Compared with the conventional CPW lines, the embedded CPW lines have shown a great reduction on loss, especially in low-impedance range. The micromachined embedded CPW lines on the high-resistivity silicon substrate (ρs = 15000 Ω-cm) achieve a measured loss as low as 0.81 dB/cm at 50 GHz. The Schwarz–Christoffel mapping technique is utilized to analysis the ECPW. The quasi-TEM transmission line parameters, resistance, inductance, conductance, and capacitance (RLGC), were also extracted and analyzed. Moreover, the micromachined embedded CPW line can fit well in the RF system-on-package applications. These features make micromachined embedded CPW a promising transmission line for RFICs application.
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