| Summary: | 博士 === 國立交通大學 === 電控工程研究所 === 101 === In recent years, the camera of portable electronics has been developed to high definition, small size and low power consumption, to compensate image blurs, the image stabilizer (IS) had been comprehensively used in digital single-lens reflex cameras, to fabricate IS small enough to be embedded in ultra thin portable electronics, Micro-Electro-Mechanical Systems (MEMS) manufacturing technique is used to develop MEMS-based IS in this dissertation, which includes the electrostatically-actuated XY stage and thermally-actuated XY stages. In fabrication part, the MEMS manufacturing processes include silicon on silicon (SOS), silicon on insulator (SOI), inductive coupled plasma (ICP), HF vapor and reaction ion etching (RIE), the suspended structures of developed devices are 50-120μm thick and the whole device is thinner than 400μm. Besides, flip-chip bonding and wire bonding technologies are utilized in packaging process. According to the experimental results, all of the developed micro XY stages are exceed the maximally hand-shaking displacement of 3X cellular phone camera requirement 24.42μm. In the part of electrostatically-actuated XY stage, the driving voltage is reduced to 51V or smaller by using the structure designs, in the other part of thermally-actuated XY stage, the driving voltage and current are reduced to 5V and 155mA or smaller by using operational amplifiers and Darlington pairs. After integrating units of driving circuits, sensors and a controller, the proposed IS can provide the equivalent effect of a shutter speed approximately 1.86 stops faster. In short, the proposed image stabilization devices not only have the ability to compensate hand-shaking, but also the advantage of device minimization, therefore, the developed image stabilization devices are very suitable to integrate with cameras of ultra thin portable electronics.
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