Research on Magnetic Catalytic Application of CMOS MEMS Compatible Gas Sensor

• Main Author: 李文傑
• Other Authors: 陳淑容
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/48624793484013899440

碩士 === 國立彰化師範大學 === 機電工程學系 === 101 === Due to the environment pollution issues and industrial demands, many researches are committed to develop a high-performance gas sensor, which can be used to detect toxic and explosive gases. CO gas sensor is one of the important research topics utilized to detect CO concentrations in environments. In this research, a gas sensor with mesh stacked electrodes mainly by using 2P4M 0.35μm CMOS MEMS IC technology of TSMC to detect the CO concentration with combination of sensing circuit. SnO2 doped with Fe3O4 is taken as sensing material and a Magnetic-Catalyst is proposed in this research. The sensitivities of gas sensing are enhanced through different angle and magnitude of magnetic field. The experiment results reveal that when the magnitude of magnetic field decreases, the sensitivities declines. Staying in horizontal magnetic field surroundings under the condition of 12 Gauss, the highest sensitivity of gas sensor 1.73%/ppm is obtained and is 7 times higher than the sensitivity of gas sensor without Magnetic-Catalyst.