Fabrication and characterization of ZrO2-based memory devices
碩士 === 國立彰化師範大學 === 光電科技研究所 === 101 === In the study, ZrO2 films deposited on Si substrates were prepared by the sol-gel method for the different polyvinyl alcohol (PVA)/Zr atomic concentration ratios. X-ray diffraction, scanning electron microscope and photoluminescence measurements were used to ch...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01227563167360139602 |