Investigating Interface Strains for thin-film SiGe on Si Substrate Using three-beam Bragg Surface Diffraction
碩士 === 國立清華大學 === 物理系 === 101 === On this research, we investigated interface Strains for thin-film SiGe on Si substrate by using surface diffraction. A new method is developed and employed to detect the interface information of heteroepitaxial structure. The main concept is to choose the similar or...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46966929833674803146 |