Development of a differential capacitive shear force sensor with SOI and polymer fill-in technique
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 101 === With the progress of medical technology and robotics, the demand of tactile sensor is more and more important. In the application of tactile sensor on robotic fingers, in order to control the size of normal force to avoid the damage by grab the object, we ne...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59315644162081599534 |