Structural Design and Improvement of a Nano-Positioning Planar Motion Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === This thesis studies the structural design and tilt compensation mechanism of a high-precision nano-positioning planar motion stage. First, a high-precision planar motion stage is designed, and structural characteristics of the stage are obtained through finite...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/24206697747127253939 |