The Applications of Inverse Disturbance Response Decoupling and Mechatronic Inerter Networks to an Optical Table

• Main Authors: Sheng-Yao Wu, 吳聲堯
• Other Authors: 王富正
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/22088981531989190342

碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === In this thesis, we discuss the design and control of an optical table. An optical table must isolate two main vibration sources: the load disturbances from the machines and the ground disturbances from the environment. Because the suspension settings for suppressing these two disturbances are conflicting, we design a double-layer structure and apply disturbance response decoupling (DRD) theorem to independently treat these two vibration sources. This thesis focuses on the following three topics: mechatronic inerter networks, the inverse DRD structure, and the simplified optical table. First, we apply the mechatronic inerter network to the passive suspension layer. In the previous studies, we used a commercial I-2000 legs to isolate the ground disturbance in a passive way and applied piezoelectric transducers as active actuators to improve the load responses. Therefore, in this thesis we extend these ideas by replacing the I-2000 legs by mechatronic inerter networks and optimize the ground disturbance responses by connecting suitable electric circuits. Second, we propose the inverse DRD structure to the optical table. In the previous works, we used soft passive structure to repress the ground disturbances, and improve the load responses by active control. Though the results demonstrated the effectiveness of DRD techniques, however, the soft passive structure might result in large vibrations to load disturbances and damage the precision machines. Therefore, in this thesis we design an inverse DRD structure that uses stiff elements to suppress the load disturbances in a passive way and improves the ground disturbance responses by active control. Lastly, we simplified the optical table system to reduce the cost of hardware. The original optical table consists of four legs. But we assume the table as rigid body, so that the warp mode can be neglected. Therefore, we can use three legs to construct the optical table that can achieve the same performance as the original design. We design and implement the aforementioned three control structures to a full optical table. Based on the simulation and experimental results, the proposed designs are deemed effective in suppressing system vibrations.