Development of an Embedded Control System in a Single-Deck, Dual-Axis Precision Positioning Stage

• Main Authors: Ming-Han Chang, 張名涵
• Other Authors: 顏家鈺
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/67072234684680251769

碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === The requirement for accuracy and velocity of precision positioning stage are increasing with the thriving high-tech industry. The precision-positioning approaches are becoming one of the techniques what various high-tech companies are investing to vigorously. Therefore, the research aims at exploring a control strategy for a novel single-deck, dual-axis precision-positioning stage. To resolve the problem to mechanical coupling in the single deck where two-dimension motion occurs, the research studies for a feasible control structure, and realizes the embedded system control with digital signal processor. The research studies for a general theory of single-axis synchronized motion control and explores the most suitable method for the positioning stage. Firstly, in the progress of implementing the control system, the research utilizes the controller in one-dimension motion system and confirms the feasibility of control theory for the system. Secondly, the research implements the positioning control in two-dimension motion system of single-deck structure. In the end, the research ameliorates the control strategy according to the property of novel mechanism, achieves the great stability of control system, and perfects the control performance eventually.