Characteristics of sputtered YSZ films on porous electrodes and AAO substrates and its application on oxygen pumps
碩士 === 國立臺灣科技大學 === 機械工程系 === 101 === This study use the magnetron sputtering method to produce three kinds of electrodes: platinum oxide (PtO), pure platinum (Pt), and co-sputtering electrodes (Pt+8YSZ). These three kinds of electrodes were on the basis of stack-up design about 500~700nm deep holes...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92728331640166419146 |