Research on Orthogonal Polarization Mirau Interferometry for Nanometer-scale Surface Profilometry
博士 === 國立臺北科技大學 === 自動化科技研究所 === 101 === White light interferometry (WLI) is a measurement technique with long measurement range and high measurement accuracy. The technique employs light with broadband spectrum. Accuracy of the surface profile reconstruction is determined by the contrast of the int...
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| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nm5b7c |