| Summary: | 碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 101 === In this study, planar potentiometric oxygen sensors had been successfully manufactured by multilayer ceramics (MLCs) process. The improvements of this study were reducing starting time, reinforcing the structure, and reducing response time of oxygen sensors. First, the heaters which developed in this study had heating speed about 28.6oC/s. These heaters could heat the sensor up to 500oC in 22 seconds. Therefore, the stating time could be reduced. Second, the electrolyte had been reinforced by changing the composition, increasing the layer’s thickness, and the structural layer. And the most suitable composition for electrolyte and protective insulating layer and structural layer were 30 vol.% of Al2O3 with 70 vol.% of 4YSZ; and 20 vol.% of 4YSZ with 80 vol.% of Al¬2O3, respectively. Third, to reduce the response time, several sensors were compared. One of the OS-E had an intense e.m.f. about 1 V. However, the response time while changing the high O2 concentration into low O2 concentration would decay with time and the yield rate was low. OSs-D had the best design. Because of the electrolyte was free from crack, electrodes and electrolyte had great adhesion. The value of e.m.f. of OSs-D could reach up to 0.75 V at low concentration atmosphere, the response time was 0.8 s, signal was stable, and the yield rate was great. Therefore, OSs-D had the best performance of all sensors that manufactured in the study.
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