Mechanism and Properties of Selective-grown ZnO Nanorods on Periodic Si Nanorod Arrays
碩士 === 國立中正大學 === 光機電整合工程研究所 === 102 === Periodic Si nanorod (NR) arrays were fabricated by nanosphere lithography as described in the previous work.1 Self-assembled monolayer of PS sphere was first prepared on Si substrate. Subsequently, plasma etcher was used to reduce the diameter of the PS spher...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z4g377 |