A new automatic recognition technology research on semiconductor wafer defect detection

碩士 === 中華大學 === 電機工程學系碩士班 === 102 === In Taiwan, flourishing electronics industry requires a lot of electronic components, Therefore, Electronic components made of semiconductor wafers is also a large and fast production, More than hundred level of the production process, The most common problem...

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Bibliographic Details
Main Authors: Wen-Tsung Chang, 張文聰
Other Authors: Leh Luoh
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/08797060477724885937

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