| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 102 === As the high-technology industry plays an important role nowadays, the technique of microeletromechanical systems (MEMS) is highly emphasized in recent years. This technique involves Opto-microfluidic, Optics, Electronics, Materials, Biology and Medical applications. By using photolithography, we can manufacture small chips which can overcome the restrictions of size for the traditional components. For example, we needed small animals to conduct drug tests and biomedical experiments in the past. Using biomedical chips, the animals can be replaced by worm viruses today. In addition, chips can be manufactured abundantly and instantly which can save the cost of both time and money dramatically. Moreover, the pollutions in the fluids with biomedical samples, such as blood, cells and DNAs, could be reduced. Opto-microfluidic chips can mix fluids and samples into the micro-channel. Meanwhile, we can illuminate the samples in the mirco-channel via the total internal reflection of the light source. However, the transport loss of light in the channel remains a main issue. We can improve this technique in many detection tests for biological cells, particles and molecules if we can understand the loss in the transportation.
In this research we developed the opto-fluidic chips which had different angles of curvature. In the past, the chip channels were designed in straight shape or bended shape with 90 degrees. Instead, in this study, total 18 channels of 3 cm in length each with six different bending degrees (15, 30, 45, 60 ,75, 90) times three different bending radii of curvature (0mm, 5mm and 10mm) were fabricated and analyzed for optical loss. The losses of 8.72 ~ 13.63 dB/cm were found with the radius of 5mm, while the losses of 9.81 ~ 14.19 dB/cm were found with the radius of 10mm. In the end, we observe the flow rate of the fluid. We found that the flow rate is about 379 μm/s while injecting 1μl fluid. The flow rate is 572 μm/s while injecting 2μl fluid. And when we injected 3ul fluid, the average flow rate would be about 1228 μm/s.
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