Carbon Footprint Assessment and Verification of Wafer Probing

• Main Authors: Hua Yu Tseng, 曾華煜
• Other Authors: 呂博裕
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/47631991586241415288

碩士 === 明新科技大學 === 工業工程與管理系碩士班 === 102 === Over the last decades, anthropogenic greenhouse gas (GHG) emissions have come to be accepted as the main cause of climate change. To find and implement GHG mitigation strategies, international efforts during this period have been devoted to quantifying the main GHG and identifying their sources. Semiconductor industry possesses the characteristics of complex supply chain, long cycle time, and high level of energy consumption. Facing the issues of climate change, energy conservation and carbon reduction, to promote the competitiveness of companies and fulfill the duty of members of global village, companies proactively undertaking GHG inventory should be treated as an important index of business strategy. This study proposes a two-stage research structure. In the first stage, the standards of ISO/TS 14067 and carbon footprint (CFP) guide of Environmental Protection Administration (EPA) are used to investigate the required principles and methods to assess CFP of wafer probing. Based on the relevant standards, the CFP of wafer probing is gained. In the second stage, the CFP results are internally verified based on the standards of ISO 14040/14044 and CFP verification guide of EPA. The flaws of CFP assessment identified in the process of verification can be used as the reference for future’s assessment operations. A real wafer probing factory is used as case study and the wafer type with the majority of probing demand is chosen to assess the CFP of wafer probing. The functional unit of target product is 25 wafers per lot. Based on the results of the case study, the CFP of wafer probing is 759.83Kg CO2e per lot. Among them, the GHG emission of energy is 758.79Kg CO2e (99.86% of total GHG emission). By reviewing the GHG emissions of energy, it can be found that the GHG emission of purchased electricity is 758.23Kg CO2e (99.79% of total GHG emission). Therefore, purchased electricity is the major GHG emitter of the CFP of wafer probing. The second stage of this study is CFP verification. A group from members of environment and security department of the case company is formed to internally verify the key points of verification. Verification results show that all the key points meet the relevant standards.