Fabrication technology research of nickel nozzle plate for micro nebulizer

• Main Authors: Yun-Shan Jian, 簡韻珊
• Other Authors: Hsi-Harng Yang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/12339250199352167757

碩士 === 國立中興大學 === 精密工程學系所 === 102 === In this study, diffraction effect of proximity printing is used to fabricate the curvature of conical structure. Next, micro-nozzle plate with particular hardness was fabricated by electroforming. The dimension of micro-nozzle plate can be defined by the mask precisely. Three steps were included in this study. First, Trace Pro simulation soft was used to simulate the illumination distribution when light pass through the mask and gap. And the result of this simulation was used to design the mask. Second, the conical structure can be fabricated by photolithography. The top size of conical structure was 5.8 μm, bottom size was 15.5 μm and the height was 37 μm. After the pattern of conical structure was defined, the micro-nozzle with 4 μm apertures was deposited by electroforming. Third, Comsol simulation soft was used to analyze and simulate the velocity of flow and flow distribution.