Failure Analysis of Piezoelectric Micropump Application Based on BVD Model

碩士 === 國立成功大學 === 電機工程學系 === 102 === The field of micro-electro-mechanical systems (MEMs) are widely used in chemical, diagnostics, medicine, and biological research. The micropumps with a lead zirconate titanate (PZT) actuator, which has a fast response time and high resolution, are most likely to...

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Bibliographic Details
Main Authors: Yi-LingLin, 林怡伶
Other Authors: Ling-Sheng Jang
Format: Others
Language:en_US
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/r92g96