Suppress the Disturbance during the Semiconductor Process by using Adaptive Disturbance Observer
碩士 === 國立交通大學 === 機械工程系所 === 102 === It is well known that the common RtR controllers like EWMA and double EWMA suffer the decrease in stability region for weights and the oscillatory or long transient performance when there is a model mismatch. Besides, the optimum weights of RtR control obtained f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28514272137194010756 |