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碩士 === 國立中央大學 === 能源工程研究所 === 102 === GaN is one of the main material of light emitting diodes, and chemical vapor deposition control of the process of GaN growth quality and uniformity of deposition quality is the most important. The concept to be stable thermal and flow field are the following, to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79533371129612515500 |