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• Main Authors: Jia-Yin Wu, 吳嘉殷
• Other Authors: Shih-Jui Chen
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/67267432452618962654

碩士 === 國立中央大學 === 機械工程學系 === 102 === This paper reports a duo-mode vibration structure for increasing usable bandwidth in micromachined electromagnetic energy harvester. The proposed energy harvester is built on edge-released MEMS structures coupled by a U-shape cantilever and spiral diaphragms that are designed to reduce flexural rigidity and lower resonant frequency. Compared to a pure cantilever harvester, the proposed cantilever-spiral coupled energy harvester has lower resonant frequencies and larger bandwidth. The power output at mode 1 and 2 of the energy harvester are measured as a function of the load resistance. In case of the energy harvester with connection #1, a maximum power of 7.6 and 7.5 nW is delivered to a 27.8 Ω at mode 1 and mode 2 resonances; with connection #2, a maximum power of 8.9 nW is delivered to a 27.8 Ω at mode 1 resonances when the load resistance is equal to the coil resistance.