Investigation the organo-silicon barrier film deposited by magnetron PECVD
碩士 === 國立中央大學 === 光電科學與工程學系 === 102 === With the rapid development of technology, consumer electronics products gradually become an indispensable part of people's lives. However, electronics based on the silicon substrate, glass fiber and glass substrates has been difficult to achieve light, th...
Main Authors: | Sheng-Chieh Huang, 黃聖傑 |
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Other Authors: | Yen -Hung Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/44668432124577593881 |
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