The Research of Collimated Exposure Machine
碩士 === 國立中央大學 === 光電科學與工程學系 === 102 === In this study, we present a research and development of a collimated exposure machine. The introduction of concept of development, the simulation of the optical system and the assembly of the optical components. The study of collimated exposure machine use xen...
Main Authors: | Yen-An Chen, 陳彥安 |
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Other Authors: | Rong-Seng Chang |
Format: | Others |
Language: | zh-TW |
Published: |
2014
|
Online Access: | http://ndltd.ncl.edu.tw/handle/66csqj |
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