Study of Metal Oxide Semiconductor Field Effect Humidity Sensing Device Using Titanium Dioxide Sensing Film with Nitrogen Doping
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 102 === The TiO2:N2 relative humidity sensing devices were accomplished in accordance with semiconductor structures. The optimum growth parameter of TiO2:N2 sensing film was decided to fabricate the well-defined relative humidity sensor. In this study, the optimum...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3f56bh |