Fabrication of Si-rich Silicon Carbide Film and Solar Cells by Low-Temperature Plasma-Enhanced Chemical Vapor Deposition
碩士 === 國立清華大學 === 物理系 === 102 === We study the preparation and characterization (characteristics or features???)of amorphous non-stoichiometric amorphous Silicon Carbide (a-SiC) thin films grown by low-temperature Plasma-Enhanced Chemical Vapor Deposition (PECVD). The ratio of R, defined as CH4/(SiH...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qn825c |