AN ELECTRO-OPTICAL INSPECTION TECHNOLOGY FOR TRANSPARENT CIRCUITS

博士 === 國立清華大學 === 動力機械工程學系 === 102 === Transparent conductive oxide (TCO) film is commonly adopted as transparent circuit, which is widely used in touch panels, displays, solar cells, etc. However, un-etched TCO remnants are frequently found in the manufacture process. These remnants and other def...

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Bibliographic Details
Main Author: 詹智翔
Other Authors: 林士傑
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/19336044158244134749
Description
Summary:博士 === 國立清華大學 === 動力機械工程學系 === 102 === Transparent conductive oxide (TCO) film is commonly adopted as transparent circuit, which is widely used in touch panels, displays, solar cells, etc. However, un-etched TCO remnants are frequently found in the manufacture process. These remnants and other defects may affect the function of the circuits. Owing to the relation between the optical profile and the conductivity of remnant of the transparent circuits is not strongly correlated, while most optical methods were more focused on depicting the structure or morphology of the objective and then could only detect defective circuits indirectly. Even on the ways of electrical testing such as probe or tip depend on the response of electrical signal will need or waste a lot of time. It is desired to design the set-up such that the instrument is capable of picking up signals that can differentiate the conducting area from non-conducting area for the transparent circuit. Both KD2PO4 and PDLC were used as the electro-optical sensing device in the study. Preliminary test was revealed the feasibility of the approach at first. And a series of simulation and experimental results were conducted to study effects of system parameters and evaluate the performance on the limitation of the inspection system for the transparent circuit. Developed system may be effect and helpful to match the original design and locate faulty shut/open circuits.