The Design and Characterization of CMOS-MEMS Metal-Contact Switches
碩士 === 國立清華大學 === 動力機械工程學系 === 102
Main Authors: | Chang, Hao-Hsin, 張浩新 |
---|---|
Other Authors: | Li, Sheng-Shian |
Format: | Others |
Language: | zh-TW |
Published: |
2014
|
Online Access: | http://ndltd.ncl.edu.tw/handle/994ntg |
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