Optimal Design of Surface Acoustic Wave Devices

• Main Authors: Nian, Yi-Wei, 粘益維
• Other Authors: Juang, Yung-Der
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/5hk358

碩士 === 國立臺南大學 === 材料科學系碩士班 === 102 === This studied plan is to propose an innovated process for fabricating the flexible SAW devices by sol-gel technology and fully ink jet technology. The ZnO solution is prepared by sol-gel technology. We design inter digital transducer (IDT) pattern and deposits ZnO solution on the flexible polyimide plastic (PI) substrate by fully ink jet process. Next, the frequency of SAW device can be measured by the function generator and spectrum analyzer. Here, 7.2MHz is the maximum gain of this device, it will be observed as the SAW center operating frequency. Through the comparison between the predicted value and experimental center frequency, the experimental center frequencies agree with the predicted value. The analysis of surface acoustic wave propagation characteristics is processed by the Finite Element Method (FEM).To discuss various designed parameters affect the central frequency response,and the numerical model will be built for optimization. The electrode thickness is reduced from 1um to 0.5um,and the frequency is raised from 7.2MHz to 7.8MHz . I simulate aluminum nitride (AlN) as piezoelectric materials and the electrode thickness is reduced from 1um to 0.5um,and the frequency is raised from 13.4MHz to 13.9MHz.