| Summary: | 碩士 === 國立臺南大學 === 機電系統工程研究所 === 102 === The flexible surface acoustic wave (SAW) device is a promising product for the expanded application of SAW device. Over the past few years, a very few attempts have been made it on the flexible substrate. The purpose of this study is to process the parametric modification on the fabrication of the flexible surface acoustic wave devices. The ZnO solution is prepared by sol-gel technology. We deposit ZnO solution on the flexible polyimide plastic (PI) substrate by ink jet process and Spin Coating. Next, x-ray diffraction (XRD) and scanning electron microscope (SEM) can obtain that about the crystal grain of the film, the material property and the surface morphology. The parametric design of the fabrication on the flexible surface acoustic wave device will be studied in this paper. The piezoelectricity of the film will increase as the thickness of the film increases. The reason is the crystallization of the film gets more robust. Finally, the planning of experiment parameters can be done by Taguchi Method. Then, the piezoelectric property can be promoted to achieve optimal analysis efficiently. This parameters can improve the efficiency of the SAW in future.
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