Mixing of gas and plasma reaction in a PECVD system
碩士 === 國立臺灣大學 === 機械工程學研究所 === 102 === In this study, numerical simulation of the nitrogen plasma jet at atmospheric pressure is performed. In terms of commercial software, three types of models, namely k-ε turbulent flow model, heat transfer in fluids model and chemical reaction model are adopted....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07666418665339774027 |