Mixing of gas and plasma reaction in a PECVD system
碩士 === 國立臺灣大學 === 機械工程學研究所 === 102 === In this study, numerical simulation of the nitrogen plasma jet at atmospheric pressure is performed. In terms of commercial software, three types of models, namely k-ε turbulent flow model, heat transfer in fluids model and chemical reaction model are adopted....
Main Authors: | Yan-Sheng Kuo, 郭延昇 |
---|---|
Other Authors: | Kuo-Long Pan |
Format: | Others |
Language: | zh-TW |
Published: |
2014
|
Online Access: | http://ndltd.ncl.edu.tw/handle/07666418665339774027 |
Similar Items
-
Flow Field and Plasma Reaction with Precursor Zinc Nitrate in a PECVD System
by: Pei-Rong Li, et al.
Published: (2016) -
On the reduction of the Plasma Arcing in a PECVD Chamber
by: 彭元宗
Published: (2006) -
Simulate of PECVD Chamber Clean Using Remote Plasma System
by: He-cheng Ji, et al.
Published: (2015) -
The importance of ions in low pressure PECVD plasmas
by: Andrew eMichelmore, et al.
Published: (2015-02-01) -
New Design Of PECVD System For The Application Of Both Sputter And Plasma Polymerization
by: Yu, Shi Shang, et al.
Published: (1996)