Applying Minimum Quantity Lubrication To Fixed Diamond Wire Sawing Process And Development Of Small-Scale Wire Saw Machine

• Main Authors: Zheng-Qing Liao, 廖政慶
• Other Authors: Chun-hui.Chung
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/74601897953631457901

碩士 === 國立臺灣科技大學 === 機械工程系 === 102 === This study has two subjects. First, in this study, the application of Minimum Quantity Lubrication (MQL) is investigated for fixed diamond wire sawing process. The cutting behavior is studied under four lubrication conditions: coolant, air, coolant mist and water mist. Experiments were conducted on a customized wire sawing machine. During the test, the cutting force and the depth of cut were monitored by a pair of load cells and a laser displacement sensor. The wear of the diamond grits was observed by the SEM images of the used wires. The results show that the coolant mist lubrication performed as efficient as the coolant. In addition, the grinding ratio is about three times higher than that with air condition. Therefore, coolant mist has the potential to reduce the cost of fixed diamond wire sawing process and is benign to the environment. Another subject is development of small-scale wire saw machine. Multi-wire sawing is widely used to slice semiconductor materials into thin wafers in wafer manufacturing process. In typical wire sawing machines, a number of servo motors are required for driving wire transmitting mechanisms, in which two motors for the wire bobbins, two motors for the dancer, and two motors for wire guides are required. The large number of motors makes the system complex to be controlled and costly. In this study, an innovative winding mechanism has been designed and fabricated for a simplified multi-wire sawing machine. The new mechanism uses only one motor for the wire feeding and collecting bobbins which are connected by linking mechanisms and gear box to introduce proper helical motion. This design reduces the required motors while the machine still maintains the ability of controlling wire speed and wire motion as in the commercial wire sawing machines.