Study of Enhancing Performance of UV Oval Condenser Mirror of Exposure Machine

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === In this thesis presents that two materials of ZrO2 and SiO2 were used to prepare multi-dielectric layers by an electron-gun evaporation technique. Measurements and analysis for the optical properties, surface roughness, We expect to get more information abo...

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Bibliographic Details
Main Authors: Chen-Kai Wang, 王貞凱
Other Authors: 謝振榆
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/unu8gt