The Influences of Hot Isostatic Pressing on the Characteristics of ZnO-based Ceramics

• Main Authors: Yi-Chieh Huang, 黃意潔
• Other Authors: 蔡丕椿
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/6qf45u

碩士 === 國立虎尾科技大學 === 材料科學與綠色能源工程研究所 === 102 === lTin-doped indium oxide (ITO) is the predominant material transparent conducting oxide (TCO）film due to its excellent resistivity (10-3~10-4 Ωcm) and visible transmittance (＞80 %). However, the substitute for ITO indium is extensively studied because indium is not only expensive but also toxic. Zinc oxide (ZnO) is also a potential material for TCO film. Numerous studies had indicated that aluminum-doped zinc oxide (AZO) and galium-doped zinc oxide (GZO) films exhibit outstanding conductivity and transmittance. However, most researches focused on the modifications of sputtering parameters. The correlation between sputtering target and film was rarely investigated though the sputtering target plays an important role on the film performances. This study examined the effects of hot isostatic pressing (HIP) on the sintered density, microstructure, crystal structure and electrical properties of ZnO-based ceramics. The mechanical properties, including hardness and bending strength, were also investigated in this study. The results showed that the sintered density of ZnO is slightly increased by HIP. However, after HIP, the sintered densities of AZO and GZO are much improved to ~100% dense. Furthermore, the resistivites of AZO and GZO can be decreased to 10-3~10-4 Ωcm. In the crystal structure, secondary phases were generated in the AZO and GZO ceramics. HIP can increase the hardness of ZnO-based ceramics. The hardnesses of ZnO, AZO, and GZO can be increased to 215, 322, and 530 Hv, respectively. Besides, the bending strength is improved with increasing the sintered density of the ceramic. The highest bending strengths of ZnO, AZO, and GZO are 104, 215, and 266 MPa, respectively. After HIP, the bending strengths of ZnO and AZO can be further improved to 182 and 260 MPa, respectively. Keyword: ZnO, AZO, GZO, Resistivity, Hot isostatic pressing, Microhardness, Flexural strength.