Summary: | 碩士 === 國立虎尾科技大學 === 機械設計工程研究所 === 102 === The study is done by the ion beam on the wafer is etched grating structure, reproduction via photolithography process a backbone waveguide graphics and soft turning mold technology will gratings fabricated on the backbone of the waveguide can be obtained raster graphics high aspect ratio , but also because the grating length is shortened, to get a better filtering effect. By components and miniaturized components can be replicated by turning a large mold technology, integrated optics on the larger applications.
This article use Optical Microscope and Surface Profilometer observed during the experiment via optical to investigate by a Scanning Electron Microscope surface structure topography measurements and record the results of the experiment, the research
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